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详细介绍
产品型号：ArF
Argon Fluoride laser optics for use at 193nm Extra-Cavity Turning Mirrors
Normal or 45° incidence
High or partial reflectance
Specifications | |
Material: | Excimer grade Fused Silica |
Surface Quality: | < 10 / 5 |
Radius of Curvature: | ∞ |
Surface Flatness: | < λ / 10 @ 633 nm |
Diameter Tolerance: | < + 0.00 / - 0.20 mm |
Thickness Tolerance: | < ± 0.25 mm |
Clear Aperture: | > 85% of diameter |
Damage Threshold: | > 1.2 J /cm², 10 ns |
Durability: | Meet adhesion and abrasion per MIL-C-675 |
| Part No. | Diameter (inch) | Thickness (inch) | Runp |
|---|---|---|---|
| 0° High Reflector | |||
| XHR-1206U-193-0 | 0.50 | 0.250 | >97% |
| XHR-1906U-193-0 | 0.75 | 0.250 | >97% |
| XHR-2506U-193-0 | 1.00 | 0.250 | >97% |
| XHR-3809U-193-0 | 1.50 | 0.375 | >97% |
| XHR-5009U-193-0 | 2.00 | 0.375 | >97% |
| 45° High Reflector | |||
| XHR-1206U-193-45 | 0.50 | 0.250 | >96% |
| XHR-1906U-193-45 | 0.75 | 0.250 | >96% |
| XHR-2506U-193-45 | 1.00 | 0.250 | >96% |
| XHR-3809U-193-45 | 1.50 | 0.375 | >96% |
| XHR-5009U-193-45 | 2.00 | 0.375 | >96% |
| Partial Reflector | |||
| XP-1206U-*R-193 | 0.50 | 0.250 | * |
| XP-1906U-*R-193 | 0.75 | 0.250 | * |
| XP-2506U-*R-193 | 1.00 | 0.250 | * |
| XP-3809U-*R-193 | 1.50 | 0.375 | * |
| XP-5009U-*R-193 | 2.00 | 0.375 | * |
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