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详细介绍
MetOne 3400系列专用高压气体扩散器（减压阀）
高压气体经过 Diffuser (30~150 Psi) 调整至常压状态后再经由颗粒计数器读出目前气体中粒子分布情形 ，可量测范围0.1um-5um。应用于半导体厂、光电厂中高压气体如PN2、O2、H2、CDA等。
高压气体经过 Diffuser (30~150 Psi) 调整至常压状态后再经由颗粒计数器读出目前气体中粒子分布情形 ，可量测范围0.1um-5um。应用于半导体厂、光电厂中高压气体如PN2、O2、H2、CDA等。
Specifications
Specifications are subject to change without notice.
| Specification | Details | |
| Dimensions (L x D) | 19.1 x 5.7 cm (7.5 x 2.25 in.) | |
| Material | Nickel-plated aluminum and stainless steel | |
| Weight | 0.57 kg (1.25 lb) | |
| Pressure range | 0.1 CFM, 1.0 CFM or 50 LPM diffuser: 206–1034 kPa (30–150 psig) 100 LPM diffuser: 344–1034 kPa (50–150 psig) | |
| Flow rate | 0.1 CFM, 1.0 CFM, 50 LPM or 100 LPM | |
| Sample gas | Dry, inert and non-toxic | |
| Inlet connector | Stainless #4 VCR fitting (modified) | |
| Outlet connector |
| |
| Orifice material | Sapphire (at the inlet end) | |
| Exhaust port | ¼-in. NPT |
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