4200A-SCS-PK1参数分析仪

亲眼见证创新！ 4200A-SCS 是一种可以量身定制、全面集成 的参数分析仪，可以同步查看电流电压(I-V)、电容电压(C-V) 和超快速脉冲式I-V 特性。作为性能的参数分析仪， 4200A-SCS 加快了半导体、材料和工艺开发速度。

4200A-SCS ClariusTM 基于GUI 的软件提供了清楚的、不折不 扣的测量和分析功能。凭借嵌入式测量专业知识和数百项随时 可以投入使用的应用测试，Clarius Software 可以更深入地挖掘 研究过程，快速而又满怀信心。

4200A-SCS 参数分析仪可以根据不同用户需求进行灵活配 置，不管是现在还是未来，都可以随时对系统进行升级。通过 4200A-SCS 参数分析仪，通往发现之路现在变得异常简便。

主要性能指标

I-V 源测量单元(SMU)

• ± 210 V/100 mA 或 ± 210 V/1 A 模块

• 100 fA测量分辨率

• 选配前端放大器提供了 10 aA测量分辨率

• 10 mHz - 10 Hz 超低频率电容测量

• 四象限操作

• 2 线或 4 线连接

C-V 多频率电容单元(CVU)

• AC 阻抗测量 (C-V, C-f, C-t)

• 1 kHz - 10 MHz 频率范围

• ± 30 V (60 V差分)内置DC偏置源，可以扩展到± 210 V(420 V 差分)

• 选配 CVIV 多通道开关，在 I-V 测量和 C-V 测量之间简便切换脉冲式I-V 超快速脉冲测量单元(PMU)

• 两个独立的或同步的高速脉冲 I-V 源和测量通道

• 200 MSa/s，5 ns 采样率

• ±40 V (80 V p-p)，±800 mA

• 瞬态波形捕获模式

• 任意波形发生器 Segment ARB® 模式，支持多电平脉冲波形，10 ns 可编程分辨率

高压脉冲发生器单元(PGU)

• 两个高速脉冲电压源通道

• ±40 V (80 V p-p)，± 800 mA

• 任意波形发生器 Segment ARB®模式，支持多电平脉冲波形，10 ns 可编程分辨率I-V/C-V 多通道开关模块 (CVIV)

• 在 I-V测量和 C-V 测量之间简便切换，无需重新布线或抬起探针

• 把 C-V测量移动到任意端子，无需重新布线或抬起探针远程前端放大器/ 开关模块(RPM)

• 在 I-V 测量、C-V 测量和超快速脉冲 I-V 测量之间自动切换

• 把 4225-PMU的电流灵敏度扩展到数十皮安

• 降低电缆电容效应

Witness innovation! The 4200a-scs is a customizable, fully integrated parameter analyzer that can synchronously view current and voltage (i-v), capacitive voltage (c-v), and ultra-fast pulse i-v characteristics. As the highest performing parameter analyzer, the 4200a-scs speeds up the development of semiconductors, materials and processes.

The 4200a-scs ClariusTM gui-based software provides clear, unbroken measurement and analysis functions. With embedded measurement expertise and hundreds of application tests ready for use at any time, Clarius Software can dig deeper into the research process quickly and confidently.

The 4200a-scs parameter analyzer can be flexibly configured according to the needs of different users, and the system can be upgraded at any time no matter it is now or in the future. With the 4200a-scs parameter analyzer, the path to discovery is now incredibly simple.

Key performance indicators

I-v source measurement unit (SMU)

210 V/100 mA or 210 V/1 A module

100 fA measurement resolution

The optional front-end amplifier provides a 10 aA measurement resolution

Measurement of ultra-low frequency capacitance at 10 mhz-10 Hz

Four quadrant operation

Connect 2 or 4 wires

C-v multi-frequency capacitor unit (CVU)

AC impedance measurement (c-v, c-f, c-t)

1 khz-10 MHz frequency range

Built-in DC offset source, expandable to 210 V(420 V difference)

Optional CVIV multi-channel switch, simple switching between i-v measurement and c-v measurement pulse i-v ultra-fast pulse measurement unit (PMU)

Two independent or synchronous high-speed pulse i-v sources and measurement channels

200 MSa/s, 5 ns sampling rate

40 V (80 V p-p), 800 mA

Transient waveform capture mode

Arbitrary waveform generator Segment ARB ® model, supporting multilevel pulse waveform, 10 ns programmable resolution

High voltage pulse generator unit (PGU)

Two high speed pulsed voltage source channels

40 V (80 V p-p), 800 mA

Arbitrary waveform generator Segment ARB ® model, supporting multilevel pulse waveform, 10 ns programmable resolution I - V/C - V multi-channel switch module (CVIV)

Easy switching between i-v measurements and c-v measurements without rewiring or lifting the probe

Move the c-v measurement to any terminal without rewiring or lifting the probe remote front-end amplifier/switch module (RPM)

Automatic switching between i-v measurement, c-v measurement and ultra-fast pulse i-v measurement

The current sensitivity of 4225-pmu was extended to tens of picoamps

Reduce the cable capacitance effect