B1517A电源测量单元（SMU）

主要特性与技术指标

直流和时间相关测量可让您对电流-电压（IV）测量结果充满信心

4 象限电源和测量功能可让您在低至 fA（毫微微安培）的范围内进行精确的电流-电压（IV）表征

测量范围是 0.1 fA - 1 A / 0.5 µV - 200 V

提供点测量、扫描测量、脉冲和采样测量功能

采样测量间隔为 100 μs

脉宽最小值为 500 μs，使用 2 μs 分辨率

准静态电容-电压（QS-CV）测量，具有泄露电流补偿

描述

在低至次 fA / µV 分辨率上执行低电流/电压测量，实现的直流测量性能

电源/测量单元（SMU）是 Keysight B1500A 半导体器件分析仪的关键测量模块。SMU 集成了电压/电流源和测量功能，可在低至 fA / µV 分辨率上执行精确的直流电流-电压（IV）测量。选件 ASU（自动传感和开关单元）可将低电流测量性能向下扩展至次 fA 范围，为您提供更高的测量性能。

SMU 还可执行准静态电容-电压（QS-CV）测量。它不仅拥有低频 CV 特征，同时还是表征栅极晶体管的表面态以及高频 CV 的重要测量方法。Keysight B1500A 支持精确的 QS-CV 测量和泄露电流补偿。

对于要求进行精密电压/电流测量的半导体、纳米器件（例如碳纳米管（CNT）和碳纳米线（CNW））、有源/无源元件、材料以及任意电气器件，SMU 结合使用 EasyEXPERT 软件的分析和数据管理能力，非常适合对这些器件进行表征。

Main features and technical indicators

Dc and time - dependent measurements give you confidence in current - voltage (IV) measurements

The 4 quadrant power supply and measurement capabilities allow you to perform accurate current-voltage (IV) characterization in a range as low as fA (nanoampere)

The measurement range is 0.1 fa-1 A / 0.5 v-200 V

Provides point measurement, scan measurement, pulse and sampling measurement functions

The minimum sampling interval is 100 s

The minimum pulse width is 500 s, using 2 s resolution

Quasi-static capacitance - voltage (QS-CV) measurement with leakage current compensation

describe

Perform low current/voltage measurements at as low as sub-fa/V resolution for optimal dc measurement performance

Power/measurement unit (SMU) is the key measurement module of Keysight B1500A semiconductor device analyzer. SMU integrates a voltage/current source and measurement function to perform accurate dc current-voltage (IV) measurements at a resolution as low as fA/V. Optional ASU (automatic sensing and switching unit) can extend the low current measurement performance down to the sub-fa range, providing you with higher measurement performance.

SMU can also perform quasi-static capacitance-voltage (qs-cv) measurements. It not only has the characteristics of low-frequency CV, but also is an important measurement method to characterize the surface state of gate transistor and high-frequency CV. Keysight B1500A supports accurate QS-CV measurements and leakage current compensation.

For semiconductors, nanodevices (such as CNT and CNW), active/passive components, materials, and any electrical device requiring precise voltage/current measurements, SMU, combined with the analytical and data management capabilities of EasyEXPERT software, is well suited for characterization of these devices.