JZJ2X真空机组技术规格表
机组型号 | 抽气速率 | 极限压力 | 功率(千瓦) | 前级泵 | 备注 | |
Pa | Tor | |||||
JZJ12X-150 | 150 | 6*10-2 | 5*10-4 | 5.2 | 2x-30 | |
JZJ12X-300 | 300 | 6*10-2 | 5*10-4 | 9.5 | 2x-70 | |
JZJ12X-600 | 600 | 1*10-1 | 5*10-4 | 13 | 2x-70 | |
JZJ12X-1200 | 1200 | 6*10-2 | 5*10-4 | 22 | 2x-70 | 两台前级泵 |
JZJ22X-150 | 150 | 1*10-2 | 8*10-5 | 6.3 | 2x-30 | |
JZJ22X-300 | 300 | 1*10-2 | 8*10-5 | 11.6 | 2x-70 | |
JZJ22X-600 | 600 | 1*10-2 | 8*10-5 | 172 | X-70 | |
JZJ22X-1200 | 1200 | 1*10-2 | 8*10-5 | 262 | X-70(2台) |